Category Archives: Rotary Table – Clear Aperture

Motion Control – High Precision, Compact 300 mm, Hollow Core, Motorized Rotary Stage!

Motion Control – Rotary Stage

Motion Control -Rotary Stage

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Van Nuys, CA – — Motion Control – The new AY110-300 Motorized Rotary Stage from Optimal Engineering Systems, Inc. (OES) features a large 180 mm (7.087 in.) open aperture. This precision, large open aperture (hollow core), low profile stage is just 65 mm (2.559 in.) high and it’s foot print is only 303 mm by 319 mm (11.929 in. by 12.559 in.) not including the motor. The rotary table of the stage has a precise pattern of threaded holes for mounting custom tooling and fixtures, and holes in the base for easy integration into new and existing applications. The diameter of the rotary table is 300 mm (11.811 in.) and the range of travel is a full 360o, and it is capable of continuous rotation. The table is driven by a smooth 288:1 worm gear and has a resolution of 0.000625o with a 10 micro-step per step stepper motor driver. The AY110-300 Rotary Stage is also available with a servo motor and optical encoder. The standard model is equipped with stepper motor and a is a knob for manual adjustment which can be replaced with an optical encoder for precision position verification.

The low cost, low profile AY110-300 Rotary Stage features a very low backlash of 0.0005o, and a positional accuracy of 0.001o, making it ideal for: laser positioning and machining, scribing, microscopy, testing, assembly, inspection, alignment, and other critical applications. This black anodized stage has a load capacity of 65Kg (143 lbs) and there is an indicator scale for visual sighting of the angle of rotation. The stage can be ordered with Plug-and-Play with a fully compatible controller from OES.

About OES – Optimal Engineering Systems, Inc. (OES) is a manufacturer of motion control products including: Stepper motor controllers and drivers, solenoid electronics, and positioning stages and slides. Applications include: Animation, automated assembly systems, automation, CNC machines, flight simulation, inspection systems, linear and rotary stages, machine tools, medical devices, motion control camera boom systems, optical comparators, CMMs, pan-tilt gimbals, PCB assembly & inspection, pick-and-place, positioning stages, robotics, scanners, security cameras, telescope drive mechanisms, time-lapse photography and winders.

Some of the industries OES serves are: Aerospace, Astronomy, Chemical, Communications, Educational Institutes, University, Colleges, Government Agencies, National Labs, Manufacturing, Medical, Metrology, Military, Motion Control, Museum, News Agencies, Semiconductor and Test Equipment. Optimal Engineering Systems, Inc’s. competitive advantage is its state-of-the-art in-house manufacturing facility in North America enabling OES to supply clients with custom designed orders or high volume just-in-time deliveries globally.

For additional information, contact sales team at: OES, 6901 Woodley Ave.; Van Nuys, CA 91406; Telephone: 888-777-1826 or +1 818-222-9200, FAX +1 818-436-0446 or E-Mail: sales@oesincorp.com or visit the website at http://www.oesincorp.com


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Application – Rotary Table from Intellidrives Tackles Big Wafers!

INTELLIDRIVES’s Direct drive rotary servo tables.

Intellidrives Motion Control Component - Rotary Table for Big Wafers

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Philadelphia, PA, — Motion Control Components and Systems – The ACR-335UT direct drive rotary table from IntelLiDrives adapts linear motor technology, coupled with precision bearings, to provide faster and more accurate handling of the 300 mm semiconductor wafers.

The 335 mm diameter center opening in the ACR-335UT rotary table easily accommodates large 300 mm (12 inch) semiconductor wafers, allowing for extraction of the chip dies from the wafer during semiconductor assembly manufacturing processes or dual side wafer inspection.

Presently, semiconductor assembly equipment manufacturers do only limited wafer rotation, but ACR-335UT stage goes 360°, at up to 300 rpm speed.

Intellidrives Motion Control Component - Rotary Table for Big Wafers Actuator

This large angle wafer rotation can be done without need to align wafer carrier before placement on the table, thereby increasing throughput. An XY table that carries the rotary table is used for linear Cartesian Alignment. The large open center allows equipment above and below the table to extract precut integrated circuit dies cut from the 300 mm wafer or to do dual side wafer measurement and inspection.

 

Intellidrives Motion Control Component - Rotary Table for Big Wafers in XY Frame

Today’s mechanical drive technologies used in processing 200 mm (8 inch wafers) such as gear drive, worm drive and belt all lack positioning stiffness and accuracy. While worm gear rotary tables can fully rotate wafer , it speed is in single digit rpm. Belt drives can rotate at high speeds, but low belt stiffness and high drive inertia results is low accuracy and poor dynamics.

While these characteristics could be tolerated in the past, since it was not until advent of the large semiconductor wafers that a high accurate, precise and large open aperture rotary actuator was needed.

The ACR-335UT rotary table is essentially a linear motor “curved” to form a ring. There are 16 RotoLinear motoring modules (up 24 modules can be installed for higher torque capability) within the ring that forms the motor. Axial placement of these modules along with the ultra-thin bearing system allowed design of the very low profile rotary stage.

The positioning stiffness of the direct drive ACR-350UT rotary table allows it to achieve and to maintain arc-sec accuracy at hundreds of rpm and excellent dynamics even during fast Cartesian (XY) wafer indexing.

Also vital, and the major manufacturing challenges, were the tight tolerances on the axial and radial bearings that allowed to achieve both axial and radial run-outs well under 10 microns.

AccuRing rotary tables provide superior angular positioning and are designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives. Low maintenance and high throughput characteristics of the AccuRing stage yields the lowest total cost of ownership.

Compact package and Superior design of the AccuRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. AccuRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery.

AccuRing utilizes direct drive three phase planar brushless motor technology. There are no brushes to replace and no gear trains or belts to maintain. Coreless magnetic design assures smooth rotation and dynamic performance.

Accurate Positioning is assured with contact-less encoder. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make AccuRing the ideal solution for applications requiring frequent directional changes.

Applications:

  • Semiconductor assembly
  • Electronics assembly
  • Precision machine tools
  • Robotic handlers
  • Wafer processing
  • Automation
System Performance Unit ACR-335UT
Center aperture mm 335
Outside diameter mm 463
Stage height mm 22
Peak Torque Tp

(Nm)

100
Continuous torque

air cooling, coil 120°C

Tc120

(Nm)

25
Peak current at Tp Amp p rrms 15
Continuous current at Tc Amp c rrms 4
Recommended voltage (note 1) Uvdc

Uvac

310

220

Max speed at Tp and Us

(note 2)

RPM
Max speed at Tc and Us

(note 2)

RPM 120
Positioning resolution

(note 3)

counts/rev

 

5,820,000 (standard)

11,640,000

(optional)

Positioning resolution (arc-sec) 0.22
Accuracy Arc-sec <10
Repeatability Arc-sec <1
Run-out axial/radial micron <10
Rotor Inertia kg x m2 0.2
Stage weight M (Kg) 10
Axial load M (Kg) 50

Note 1: Rotary table can operate at lower voltages with lower speeds

Note 2: Speed values shown at rated torque

Note 3: Max speed may be limited by controller’s encoder frequency input.

Sin/cos 1 Vpp and other encoder resolutions available.

Contact the factory.

Intellidrives Motion Control Component - Rotary Table for Big Wafers Drawings

TO SEE VIDEO – LARGE APERTURE ULTRA THIN DIRECT DRIVE ROTARY TABLE – CLICK HERE

TO SEE VIDEO – INTEGRATED LARGE APERTURE XY – ROTARY SYSTEM – CLICK HERE

FOR ADDITIONAL INFORMATION – CLICK HERE

About IntelLiDrives —

IntelLiDrives, Inc. manufactures linear actuators, XY tables and rotary tables for the industry, government, science and research institutions around the world. Our precision rotary actuators, XY stages and linear actuators are used in the applications in medical devices, life sciences, semiconductor and electronic assembly manufacturing, data storage, laser processing, military/aerospace, photonics, automotive and test assembly, research and development and other industries requiring high precision and throughput motion control solutions.

For further information on this new product or others in our extensive product portfolio, call 1-215-728-6804 or e-mail Intellidrives at sales@intellidrives.com.com or go Intellidrive – Contact Us at: www.intellidrives.com/contact-us

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Motion Control – Ultra-Thin Large Aperture Direct Drive Rotary Tables (DDR) from Intellidrives!

Intellidrives Motion Control Component - Ultra Thin Rotary Table

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Philadelphia, PA, — Motion Control Components and Systems – UltraThin ServoRing rotary tables provide superior angular positioning and are designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives. Low maintenance and high throughput characteristics of the AccuRing stage yields the lowest total cost of ownership.

Compact package and Superior design of the AccuRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. AccuRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery.

AccuRing utilizes direct drive three phase planar brushless motor technology. There are no brushes to replace and no gear trains or belts to maintain. Coreless magnetic design assures smooth rotation and dynamic performance.

Accurate Positioning is assured with contact-less encoder. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make AccuRing the ideal solution for applications requiring frequent directional changes

Idear for: Semiconductor assembly, electronics assembly, precision machine tools, Robotic handlers, wafer processing, and automation.

Specifications

System Performance

Unit

ACR-160UT

Center aperture mm

158

Outside diameter mm

287

Stage height mm

22

Peak Torque Tp

(Nm)

24

Continuous torque

air cooling, coil 120°C

Tc120

(Nm)

8

Peak current at Tp

Amp p rrms

15

Continuous current at Tc

Amp c rrms

4

Recommended voltage (note 1) Uvdc

Uvac

310

220

Max speed at Tp and Us

(note 2)

RPM

300

Max speed at Tc and Us

(note 2)

RPM

500

Positioning resolution

(note 3)

counts/rev

3,600,000 (standard)

7,200,000

(optional)

Positioning resolution (arc-sec)

0.36

Accuracy Arc-sec

<10

Repeatability Arc-sec

<1

Run-out axial/radial micron

<10

Rotor Inertia kg x m2

0.06

Stage weight M (Kg)

6

Axial load M (Kg)

30

Note 1: Rotary table can operate at lower voltages with lower speeds

Note 2: Speed values shown at rated torque

Note 3: Max speed may be limited by controller’s encoder frequency input.

Sin/cos 1 Vpp and other encoder resolutions available.

Contact the factory.

Intellidrives Motion Control Component - Ultra Thin Large Aperture Rotary Table drawing

 

FOR ADDITIONAL INFORMATION – CLICK HERE

 

About IntelLiDrives

IntelLiDrives, Inc. manufactures linear actuators, XY tables and rotary tables for the industry, government, science and research institutions around the world. Our precision rotary actuators, XY stages and linear actuators are used in the applications in medical devices, life sciences, semiconductor and electronic assembly manufacturing, data storage, laser processing, military/aerospace, photonics, automotive and test assembly, research and development and other industries requiring high precision and throughput motion control solutions.

For further information on this new product or others in our extensive product portfolio, call 1-215-728-6804 or e-mail Intellidrives at sales@intellidrives.com.com or go Intellidrive – Contact Us at: www.intellidrives.com/contact-us

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Motion Control – Precision 30 mm Clear Aperture Vertical Rotation Stage from OES!

Motion Control - OES AR59 vertical stage

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Van Nuys, CA – — Motion Control – The precision AR59-AV Motorized, 30 mm Clear Aperture Vertical Rotation Stage from Optimal Engineering Systems, Inc. (OES) features a 180:1 precision worm drive and deep grove ball bearings for a high resolution of ± 0.001O when microstepping (10 micro steps-per-step). The parallelism of the table is less than 50µm. The AR59-AV vertical rotation stage is ideal for: Micro robotics, metrology, vision systems, positioning of mirrors and lasers, laser machining or scribing, electronic assembly, testing, and photonics

The clear aperture of the AR59-AV vertical rotation stage allows for vacuum and / or electrical lines, as well as optics. A knob on the motor shaft allows for manual positioning. This knob may be replaced with an optical encoder for position verification. This compact black anodized vertical rotation stage with a full 360O of rotation and 30 mm (1.181 inches) clear aperture measures just 116.5 mm (4.587 inches) long x 80 mm (3.150 inches) high and the base is 60 mm (2.362 inches) x 60 mm (2.362 inches) for stability with 4 countersunk mounting holes for easy integration into new and existing applications. The 59 mm (1.181 inches) dia. table has 8 drilled and tapped (8-M3x6l) mounting holes for easy mounting of tooling, supports loads to 1 Kg 2.2 lb), and has scale to clearly display the angle of rotation. Compatible with OES’s line of motion controllers, the AR59-AV vertical rotation stage is available as a Plug-and-Play system or with an optical encoder for position verification. A larger vertical rotation stage and standard horizontal rotary stages are also available.

About OES Optimal Engineering Systems, Inc. (OES) is a manufacturer of motion control products including: Stepper motor controllers and drivers, solenoid electronics, and positioning stages and slides. Applications include: Animation, automated assembly systems, automation, CNC machines, flight simulation, inspection systems, linear and rotary stages, machine tools, medical devices, motion control camera boom systems, optical comparators, CMMs, pan-tilt gimbals, PCB assembly & inspection, pick-and-place, positioning stages, robotics, scanners, security cameras, telescope drive mechanisms, time-lapse photography and winders

Some of the industries OES serves are: Aerospace, Astronomy, Chemical, Communications, Educational Institutes, University, Colleges, Government Agencies, National Labs, Manufacturing, Medical, Metrology, Military, Motion Control, Museum, News Agencies, Semiconductor and Test Equipment. Optimal Engineering Systems, Inc’s. competitive advantage is its state-of-the-art in-house manufacturing facility in North America enabling OES to supply clients with custom designed orders or high volume just-in-time deliveries globally.ve advantage is its state-of-the-art in-house manufacturing facility in North America enabling OES to supply clients with custom designed orders or high volume just-in-time deliveries globally.

For additional information contact Customer Service at Optimal Engineering Systems, Inc. (OES) , 6901 Woodley Ave, Van Nuys, CA 91406; Tel: 888-7071-1826, +1 (818) 222-9200, E-Mail: sales@oesincorp.com or visit the website at http://www.oesincorp.com

Motion Control Components – ServoBelt Rotary Stages are Available from Electromate!

ServoBelt Rotary Stage Family from Bell Everman is Available from Electromate!

Electromate offers Bell Everman Motion Control Rotary Stages

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Vaughan, Ontario, Canada — Motion Control — ServoBelt Rotary Stages from Bell Everman are compact, high-torque rotary stages that offer through hole size and speed comparable to direct-drive rotary tables costing thousands more.

Features include:

  • Room in the Middle. ServoBelt Rotary stages offer two different through hole configurations. Available with 50-, 100- or 200-mm center openings, our large through hole stages accommodate large bundles of power, signal and pnuematic conductors. They also make it easy to integrate laser and optical systems. Standard-sized models with 16- or 25-mm through holes offer a more economical choice when fewer utilities need to pass through the center of the stage.
  • Direct Drive Performance. Designed for NEMA 23 and 34 motors, the ServoBelt rotary stages offer speeds up to 1,000 rpm, continuous torque to 6.6 N-m and resolution down to 0.16 arc-sec with Renishaw ring encoders or tape scales for partial rotation.
  • Application Flexibility. ServoBelt Rotary stages support both continuous rotation and variable indexing applications
  • Robust, Lubed-for-Life Bearings. ServoBelt Rotary stages incorporate large full duplex, angular contact bearings, imparting moment and load capacities far in excess of its usual application requirements. This excess load capacity translates into virtually limitless bearing life.
  • Cost Effective. ServoBelt Rotary stages offer an economical solution for a variety of medium-duty rotary motion jobs such as driving carousel tables on packaging and assembly machines and providing fourth-axis rotary motion for laser cutting and mini CNC machines.

CLICK HERE to view the Bell Everman ServoBelt Rotary Stages Brochure

CLICK HERE to view all of the Bell Everman Motion Control Components available from Electromate

For further information on this new product or others in our extensive product portfolio, call 1-877-SERVO99 (737-8699) or e-mail Warren Osak at sales@electromate.comor visit Electromate at: www.electromate.com

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Motion Control – 100 mm Hollow Shaft Rotary Actuator from Intellidrives!

Intellidrives Motion Control Hollow Shaft Rotary Actuators

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Philadelphia, PA, — Motion Control Components and Systems – RTGA Series motorized rotation stages provide precision angular positioning accuracy combined with high load capacity. There are three stage sizes with center aperture from 32 mm to 100 mm available, optimizing load capacity, torque, speed and resolution for a variety of operating conditions. Cross-roller bearings allow for offcenter loads in a reduced footprint. The single monolithic design offers improved stiffness without compromising dynamic performance. Precise rotation is ensured by gear/pinion mechanism. RTGA stages are driven by the open loop stepper motors or closed loop servo-step motor with programmable resolutions to provide sub arc-sec angular resolution.

 

 

PARAMETER / MODEL

 

 

Unit

 

RTGA-85-33

 

RTGA-130-62

 

RTGA-200-100

Hollow shaft mm 33 62 100
Table diameter mm 85 130 200
Gear ratio (motor/table)
– 18:1 –
Max torque Nm 2.5 12 50
Max speed rpm
– 40 –
Repeatability (Unidirectional) arc-sec
– 20 –
Reversal Value (Hysteresis) arc-min
– 3 –
Angular accuracy arc-min
– 4 –
Axis load kg 50 100 200
Off-center moment load Nm 10 50 100
Axial run-out microns
– 20 –
Parallelism microns
– 30 –
Stage weight kg 1.5 3 10
Motor
– Stepper motor with encoder option
Closed loop ServoStep –
Resolution arc-sec
– 5 (with encoder option) –

 

Intellidrives Motion Control Hollow Shaft Rotary Actuators-Drawing

 

 

About IntelLiDrives

IntelLiDrives, Inc. manufactures linear actuators, XY tables and rotary tables for the industry, government, science and research institutions around the world. Our precision rotary actuators, XY stages and linear actuators are used in the applications in medical devices, life sciences, semiconductor and electronic assembly manufacturing, data storage, laser processing, military/aerospace, photonics, automotive and test assembly, research and development and other industries requiring high precision and throughput motion control solutions.

For further information on this new product or others in our extensive product portfolio, call 1-215-728-6804 or e-mail Intellidrives atsales@intellidrives.com.com or go Intellidrive – Contact Us at: www.intellidrives.com/contact-us

 

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Motion Control – Open Frame XY-Rotary Systems from Intellidrives!

Intellidrives Motion Control Components - ARC Series XY Rotary TablesMotion Control Components - Intellidrives-Logo

 

Philadelphia, PA, — Motion Control Components and Systems – Open-frame low profile XY-Rotary stages designed for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive mechanism located on the side of the unit and large center hole-through rotary table offer a clear unobstruced access to the wafer from both sides.

 

Parameters
Unit XY-OF-UL-200×200+

ACR160UT 

 

XY-OF-UL-280×280+

ACR260UT 

XY-OF-UL-350×350+

ACR335UT

 

XY table

 

XY-OF-UL-200×200 XY-OF-UL-280×280 XY-OF-UL-350×350

 

Rotary table ACR-160UT ACR-260UT ACR-335UT
Motor type brushless servo motor /encoder (standard)

linear servo motor (option)

XY stroke mm x mm

 

200 x 200  

280 x 280

 

 

350 x 350

 

Angular rotation deg – 360 -360 -360
Center aperture dia

mm

160 260 335
Resolution (linear) µ 1 (note 1,2)

2.5 (note 3)

1 (note 1,2)

2.5 (note 3)

1 (note 1,2)

2.5 (note 3)

Resolution (rotary) arc-

sec

-1.4 -1 -0.9
Repeatability (linear) µ 5 (note 3)

1 (notes 1,2)

Repeatability (rotary) arc-

sec

2
Speed mm/

sec

400  (note 3)

800  (note 2)

Load weight kg 30
Stage weight kg 16 22 28

(note 1)     with linear encoder (option)

(note 2)     with linear servo  motor (option)

(note 3)     ball screw 10 mm lead, brushless servo driven

For additional information on unit XY-OF-UL-200×200+ACR160UT CLICK HERE!

For additional information on unit XY-OF-UL-280×280+ACR260UT CLICK HERE!

For additional information on unit XY-OF-UL-350×350+ACR335UT CLICK HERE!

About IntelLiDrives

IntelLiDrives, Inc. manufactures linear actuators, XY tables and rotary tables for the industry, government, science and research institutions around the world. Our precision rotary actuators, XY stages and linear actuators are used in the applications in medical devices, life sciences, semiconductor and electronic assembly manufacturing, data storage, laser processing, military/aerospace, photonics, automotive and test assembly, research and development and other industries requiring high precision and throughput motion control solutions.

For further information on this new product or others in our extensive product portfolio, call 1-215-728-6804 or e-mail Intellidrives at sales@intellidrives.com.com or go Intellidrive – Contact Us at: www.intellidrives.com/contact-us

Motion Control – Large Clear Aperture Rotary Table, Servobelt 350 from IntelLiDrives!

Intellidrives Motion Control Component - RTHPB 350 Large Aperture Rotary Table

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Philadelphia, PA, — Motion Control Components – The RTHP-B-350 features large clear aperture of 350 mm and provides arc-second resolution when driven from a micro-stepping or brushless servomotor controller. The low profile design is made possible by the use of compact precision bearing. The rotating carriage of the stage provides unlimited motorized rotation angle of the load up to 100kg and has large clear aperture to allow the passage of the optical path or cables directly through the stage.

The main body of the stage is made from lightweight anodized aluminum and can attach directly to an optical table or moving linear or XY actuators and can be mounted at any orientation. RTHP-B-350 stage uses belt drive with stepper or brushless servo motor to achieve high rotating speed. Compact design makes it easy to incorporate this rotary stage into high dynamics XY-Theta multi-axes stages.

Features

  • Large center aperture 350 mm
  • Low profile 71 mm
  • Stepper or servo motor driven
  • Unlimited rotation
  • High speed 200 RPM (with servo motor)
  • Home switch
  • Up/Down motor mount option

Specifications

Parameter Unit RTHP-B-350
Rotation range deg Continuous 360O
Resolution Arc-sec 10
(Note1) Deg 0
Max speed RPM 100 RPM (with stepper)
(Note 2) 200 RPM (with servo)
Repeatability (unidirectional) Arc-sec 20
Run-out axial/radial micron 30
Axial load capacity Kg 100
Stage weight Kg 8
Motor type Stepper motor (standard)
Servo motor (optional)
Drive mechanism Motorized belt drive
Transmission ratio Motorized belt drive
Motor/Stage
Home sensor Open collector, 20 mA, 5VDC
Construction Anodized Aluminum

Intellidrives Motion Control Component - RTHPB 350 Large Clear Aperture Rotary Table-Drawing

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

About IntelLiDrives

IntelLiDrives, Inc. manufactures linear actuators, XY tables and rotary tables for the industry, government, science and research institutions around the world. Our precision rotary actuators, XY stages and linear actuators are used in the applications in medical devices, life sciences, semiconductor and electronic assembly manufacturing, data storage, laser processing, military/aerospace, photonics, automotive and test assembly, research and development and other industries requiring high precision and throughput motion control solutions.

For further information on this new product or others in our extensive product portfolio, call 1-215-728-6804 or e-mail Intellidrives atsales@intellidrives.com.com or go Intellidrive – Contact Us at: www.intellidrives.com/contact-us

 

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