Category Archives: Stage – Vacuum Compatible

Motion Control – Four Axis Vacuum Compatible Gantry from H2W Technologies.

H2W Technologies Four-Axis-Vacuum-Compatible Gantry

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Santa Clarita, CA —– Motion Control — Fully vacuum compatible four axis positioning gantry (XYTZ). The XY axes are driven by brushless linear motor DR Positioning Stages. The Theta axis is a worm gear stage that is driven by a rotary stepper motor under closed loop control in conjunction with an arc-segmented linear encoder. The Z axis linear motion is achieved by using a voice coil positioning stage operating under closed loop position control. The four axes operate under synchronized position control in conjunction with a non-contact analog output position feedback device that is used to control the position with respect to a silicon wafer. The stage includes a fully integrated four axis electronics package that allow each axis to operate under closed loop control..

All components were selected for their low outgassing characteristics and the system was designed to fit within a customer designed vacuum chamber. This gantry was designed to perform secondary processing procedures on a silicon wafer while exposed to a vacuum.

Features:

  • Vacuum Compatible
  • Rotary axis is capable of full 360 degree rotation
  • Includes mounting holes for payload
  • Payload up to 10 lbs (4.4 kg)
  • Small footprint
  • Coordinated four axis control
Multi-Axis Stage
Product Details (PDF) PDF Tag
XY Horizontal Axis (Brushless Linear Motor Stage)
Motor P/N
Stroke 6.2 in 157.48 mm
Encoder Resolution 0.2 micron
Force @ 100% Duty 20.6 lbs 91.6 N
Force @ 10% Duty 61.8 lbs 274.8 N
Vertical Axis (Voice Coil Motor Stage)
Motor P/N NCC10-30-108-1H 
Stroke 1 in 25.4 mm
Encoder Resolution 0.2 micron
Force @ 100% Duty 10.8 lbs 48 N
Force @ 10% Duty 32.4 lbs 144 N
Rotary Axis (Rotary Stage)
Motor P/N N/A
Stroke +-10 degrees +-0.17 rads
Encoder Resolution 0.29 arc-seconds
Force 1416 oz-in 10 N-m

YouTube Video

https://www.youtube.com/watch?time_continue=8&v=MFLkSiqwSJI

About H2W Technologies, Inc.

H2W Technologies, Inc. is dedicated to the design and manufacture of linear and rotary motion products that are used in the motion control industry. The complete line of linear electric motors includes: Single and dual axis linear steppers, DC brush and brushless linear motors, voice coil actuators, and AC induction motors. Also offered is a complete line of ball screw, lead screw and belt driven positioning stages.

Other motion control products include: Limited angle torque motors for compact, limited angular excursion rotary servo applications, 3 phase brushless rotary servo motors with matching digital servo amplifiers and permanent magnet linear brakes for fail-safe, zero power braking for baggage handling and people moving applications as well as amusement park rides.

With over 75 years combined experience in the linear and rotary motion field, the H2W Technologies team of engineers offers the optimal solution to the most demanding motion control, requirements.

For additional information contact Mark Wilson at H2W Technologies, 26380 Ferry Ct, Santa Clarita, CA 91350; Tel: 888-702-0540, Fax: 661-251-2067, E-Mail: info@h2wtech.com or visit the website at http://www.h2wtech.com

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Motion Control – Vacuum Compatible Single Rail Stage!

Linear Motion – Single Rail Stages – SRS-008-04-020-01V

Santa Clarita, CA – Motion Control – The SRS-008-04-020-01V vacuum compatible single rail positioning stage uses a brushless linear motor to generate a continuous/peak force of 20.6 lbs [91.6 N]/61.8 lbs [275 N] with a total stroke length of 8.3 in [210 mm]. The non-contact 1.0-micron resolution encoder allows for precise positioning. It is guided by a rigid recirculating ball linear bearing. There are also provisions that allow customer cables to be routed within the cable carrier. This single rail positioning stage has been manufactured using low-outgassing materials as selected by NASA in order to make it vacuum compatible. It has end-of-travel bumper stops. A home positioning sensor, end-of-travel-sensors, and custom mounting holes on the moving table are available upon request.For a detailed description of all the considerations taken when manufacturing a vacuum compatible system, please click here.

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Stroke 8.3 in 210 mm
Encoder Resolution 1.0 micron
Bearing Type Recirculating Ball
Moving Mass 3.5 lbs 1.6 kg
Total Mass 18.0 lbs 8.2 kg
Resistance @ 20C 8.1 ohms
Inductance @ 20C 6.0 mH
Electrical Time Constant 0.70 msec
Motor Constant 2.1 lbs/√watt 9.4 N/√watt
Force Constant 6.1 lbs/amp 27.3 N/amp
Back EMF 0.80 V/ips 31.5 V/m/sec
Force @ 100% Duty 20.6 lbs 91.6 N
Power @ 100% Duty 95.0 watts
Current @ 100% Duty 3.4 amps
Force @ 10% Duty 61.8 lbs 275 N
Power @ 10% Duty 846 watts

For drawing go to https://www.h2wtech.com/pdf/2014-05-21-22-56-32.PDF

About H2W Technologies, Inc

H2W Technologies, Inc. is dedicated to the design and manufacture of linear and rotary motion products that are used in the motion control industry. The complete line of linear electric motors includes: Single and dual axis linear steppers, DC brush and brushless linear motors, voice coil actuators, and AC induction motors. Also offered is a complete line of ball screw, lead screw and belt driven positioning stages.

Other motion control products include: Limited angle torque motors for compact, limited angular excursion rotary servo applications, 3 phase brushless rotary servo motors with matching digital servo amplifiers and permanent magnet linear brakes for fail-safe, zero power braking for baggage handling and people moving applications as well as amusement park rides.

With over 75 years combined experience in the linear and rotary motion field, the H2W Technologies team of engineers offers the optimal solution to the most demanding motion control, requirements.

For additional information contact Mark Wilson at H2W Technologies, 26380 Ferry Ct, Santa Clarita, CA 91350; Tel: 888-702-0540, Fax: 661-251-2067, E-Mail: info@h2wtech.com or visit the website athttp://www.h2wtech.com

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